Publication # 230

G.A. Keeler, N.C. Helman, P. Atanackovic, and D. A. B. Miller, "Cavity Resonance Tuning of Asymmetric Fabry-Perot MQW Modulators Following Flip-Chip Bonding to Silicon CMOS," in Optics in Computing 2002, Taipei, Taiwan (April 8-11, 2002) Paper OWA2

We present a post-integration cavity resonance tuning technique for asymmetric Fabry-Perot MQW modulators flip-chip bonded to silicon CMOS. The process relies on highly selective chemical etching and GaAs surface oxidation. Device characteriitics are discussed.

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