Nanotechnology & NEMS/MEMS

Nano- and micro-electromechanical systems (NEMS/MEMS) are useful for applications ranging from chemical sensors and relays to logic devices. Examples include:

  • The design of MEMS accelerometers, gyroscopes, electrostatic actuators, and microresonators;
  • Interfacial engineering for NEMS/MEMS;
  • Biosensors, magnetic biochips, in vitro diagnostics, cell sorting, magnetic nanoparticles, spin electronic materials and sensors, magnetic inductive heads, and magnetic integrated inductors and transformers;
  • Flexible substrates for electronics, sensors, and energy conversion platforms;
  • Nanofabrication and nanopatterning technologies, including self-assembly for device fabrication.

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Dawson Engler

Dawson Engler Associate Professor

Gates 341 (9025)
Website

Villanueva, Andrea Administrator

Gates 349 (9025)
650-497-6728
andi.villanueva@stanford.edu

Jonathan Fan

Jonathan Fan Assistant Professor

Spilker 307 (4088)
Website

Tarien, Ingrid Administrator

Spilker 306 (4088)
723-0206
ingrid@ee.stanford.edu

Shanhui Fan

Shanhui Fan Professor

Spilker 314 (4088)
Website

Ungson, Socorro Administrator

Spilker 213 (4088)
723-0203
sungson@stanford.edu

Chelsea Finn

Chelsea Finn Incoming Faculty

Gates Bldg ()

Bernd Girod

Bernd Girod Professor

Pkd 373 (9515)
Website

Lin, Helen Administrator

Packard 217 (9515)
650-497-6217
helenlin@stanford.edu

Patrick M. Hanrahan

Patrick M. Hanrahan Professor

Gates 370 (9035)
Website
James S. Harris

James S. Harris Professor

Allen 328X (4075)
Website

Frost, Chet Administrator

Allen 329X (4075)
723-0983
cffrost@stanford.edu

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