Carbon nanotubes exhibit a number of excellent mechanical and electronic properties as functional materials in sensors. In particular single walled carbon nanotubes (SWNT) are known for their band gap modulation due to mechanical strain, or electronic property-changes due to interaction with surrounding molecules, but also for their ultra-low power consumption. We present results on individual SWNTs as functional material in field effect transistors, mechanical and chemical sensors. We discuss the influence of process variations on the properties of SWNT devices, and options for sensor fabrication.
Christofer Hierold has been Professor of Micro and Nanosystems at ETH Zurich since April 2002. His research is focused on the evaluation of new materials for MEMS, on advanced microsystems, and on carbon nanotubes for sensors. From 2009 until 2014 he was Head and Deputy Head of the Department of Mechanical and Process Engineering at ETH Zurich. He is Executive Coordinator ETH Zurich of the Binnig and Rohrer Nanotechnology Center (BRNC) in collaboration with IBM Research, Rüschlikon. Christofer Hierold is Editor-in-Chief of the IEEE Journal of Microelectromechanical Systems. He is member of the Swiss Academy of Engineering Sciences (SATW).