This presentation provides an overview of current MEMS technology, its applications, and market share. MEMS-fabrication processes are described, and the challenges of MEMS compared to standard IC techniques are discussed. After a description of the evolution of MEMS, the presentation provides a short survey of MEMS applications. Then, the principles of the newest inertial sensors for ESP-systems are described, with an emphasis on the design concepts pertaining to the sensing element, and to the evaluation circuits, for achieving excellent performance. This presentation concludes with an outlook on arising new MEMS applications, such as energy harvesters and micro-fuel cells.
Dr. Marek is currently Senior Vice President of Robert Bosch's Corporate Research Centers in Palo Alto, Pittsburgh and Boston. He oversees the overall strategy, planning, operations and research direction of the institutes.
Beginning December 2003 through December of 2012, Dr. Marek was Senior Vice President of Engineering Sensors at Bosch- Automotive Electronics Division, responsible for the MEMS activities at Bosch.
From 1990 until 1999 Dr. Jiri Marek was responsible for the Bosch Sensor Technology Center; in November 1999 he became Vice President Engineering of Restraint Systems and Sensors.
Dr. Marek studied Electrical Engineering at the University of Stuttgart, Germany and Stanford University, USA. In 1983 he received his PhD from University of Stuttgart and Max-Planck-Institut, Stuttgart for his work on the analysis of grain boundaries in large grain polycrystalline solar cells. After a post doctoral fellowship with IBM Research, San José, California he was a development engineer with Hewlett- Packard, Optical Communication Division. In 1986 he started his work with Robert Bosch GmbH in Reutlingen, Germany.