Next-generation nanoelectronics for logic and memory are based on devices increasingly smaller, more three-dimensional in shape and containing even more types of materials. Evaluating nanometre-scale features of such devices, including carrier profiling, strain, electrical and chemical properties represents a challenge for materials catherization. Here, after introducing the current and proposed logic and memory devices at advanced nodes, I will present dedicated two- and three-dimensional analysis methods to merge our present capability of materials characterization with site-specific and failure analysis. Different techniques are presented and combined to maximize our sensing capability and boost the process development of various emerging technologies, including fin-based field-effect transistors (FinFET) and various types of non-volatile resistive switching memories.
Umberto Celano is a Senior Scientist at imec (Belgium), with expertise in semiconductor technology, device physics, materials and nanoscale measurements for integrated circuit (IC) at advanced nodes. He received his Ph.D. in Physics from the University of Leuven - KU Leuven (Belgium) in 2015. His research has established a novel three-dimensional nanoscale imaging technique that combines sensing with sub-nm material removal to study materials in confined volumes. Currently, Dr. Celano is with the Geballe Laboratory for Advanced Materials (GLAM) at Stanford University (US), where he focuses on the study of tuneable plasmonic nanoantennas in the lab of Prof. Brongersma.
Umberto is the recipient of the Rogen A. Haken Best Paper Award at IEDM (2013) and has authored or co-authored 60+ papers in international journals and conference proceedings. He works with the metrology working-group in the International Roadmap for Devices and Systems (IRDS) and he is a member of the early carrier editorial board of Nano Letters. Previously, Umberto received his B.Eng. in Electronic Engineering and a M.Sc. degree in Nanoelectronics with honors from the University of Rome Sapienza, Italy.