414. S. Claussen, K. C. Balram, E. Fei, T. Kamins, J. Harris, and D. A..B. Miller, “Selective-Area Growth of Ge and Ge/SiGe Quantum Wells in 3 µm Silicon-on-Insulator Waveguides,” Conference on Lasers and Electro-Optics (CLEO’12), San Jose, CA, May 2012, Paper CTu2J.4
We demonstrate a robust process for growing high-quality bulk Ge and Ge/SiGe
quantum wells in selected areas of 3 μm thick silicon-on-insulator waveguides, eliminating sidewall growth and hence facilitating low-insertion-loss optical modulators.
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