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Publication # 215

S. R. Bhalotra, J. D. Mansell, H. L. Kung, and D. A. B. Miller, "Parallel-plate MEMS Mirror Design for Large On-resonance Displacement," in International Conference on Optical MEMs 2000, Kauai, HI (Aug 21-24, 2000). Poster P5.

We present an electrostatically actuated MEMS mirror with 65 Ám of displacement. This design provides a 2 mm square reflective surface and allows for easy fabrication, making it suitable for a wide range of applications..

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