||S. R. Bhalotra, J. D. Mansell, H. L.
Kung, and D. A. B. Miller, "Parallel-plate MEMS Mirror Design for
Large On-resonance Displacement," in International Conference on
Optical MEMs 2000, Kauai, HI (Aug 21-24, 2000). Poster P5.
present an electrostatically actuated MEMS mirror with 65 Ám of
displacement. This design provides a 2 mm square reflective surface
and allows for easy fabrication, making it suitable for a wide range
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